Elastomer based electrically tunable, optical microcavities
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Tunable optical elements are mostly realized by microelectromechanical systems, which require expensive and complex lithography during processing. We demonstrate an alternative device based on an electrically tunable microcavity employing a dielectric soft elastomer actuator. The cavity resonance is varied by changing the physical cavity thickness due to electrostriction of the soft elastomer. We realize a tunable metal-elastomerDBR multi-half wavelength microcavity with a cavity layer thickness around 12 µm and quality factors up to 700. Applying a voltage up to 60 V between bottom ITO and top metal electrode tunes the wavelength of the cavity modes up to ∆λ = 14 nm, which relates to a cavity thickness change of about 200 nm. This concept allows the implementation of tunable optical elements like tunable filters or resonators with low cost and simple processing.
Slowik , I , Kronenberg , N M , Franke , M , Fischer , A , Richter , A , Gather , M C & Leo , K 2016 , ' Elastomer based electrically tunable, optical microcavities ' , Applied Physics Letters , vol. 109 , no. 17 , 171104 . https://doi.org/10.1063/1.4966549
Applied Physics Letters
© 2016, the Author(s). This work has been made available online in accordance with the publisher’s policies. This is the author created, accepted version manuscript following peer review and may differ slightly from the final published version. The final published version of this work is available at scitation.aip.org / http://dx.doi.org/10.1063/1.4966549