Control of Q-factor in nanobeam cavities on substrate
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In this paper, we demonstrate how to efficiently control the quality factor of silicon nitride nanobeam cavities, grown on a silica substrate and embedded in an upper cladding, by engineering the nanobeam cross-section and the shape of the periodic holes. We propose optimized configurations that are able to overcome the decreasing of the Q-factor when the nanobeam is embedded in an asymmetric medium. More precisely, we show that the maximum achievable quality factor can be designed and tuned in asymmetric configurations where the upper cladding is particularly different from the substrate one. These optimized configurations exhibit high-Q factor and small mode volume over a wide range of the upper cladding refractive index paving the way for the realization of innovative optical sensors and for the compensation of fabrication tolerances in embedded optical nanobeam cavities.
Panettieri , D , O'Faolain , L & Grande , M 2016 , Control of Q-factor in nanobeam cavities on substrate . in 2016 18th International Conference on Transparent Optical Networks, ICTON 2016 . , 7550638 , IEEE , 18th International Conference on Transparent Optical Networks, ICTON 2016 , Trento , Italy , 10-14 July . DOI: 10.1109/ICTON.2016.7550638conference
2016 18th International Conference on Transparent Optical Networks, ICTON 2016
© 2016, IEEE. This work is made available online in accordance with the publisher’s policies. This is the author created, accepted version manuscript following peer review and may differ slightly from the final published version. The final published version of this work is available at ieeexplore.ieee.org / https://dx.doi.org/0.1109/ICTON.2016.7550638
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