Holmium hafnate : an emerging electronic device material
Abstract
We report structural, optical, charge transport, and temperature properties as well as the frequency dependence of the dielectric constant of Ho2Hf2O7 (HHO) which make this material desirable as an alternative high-k dielectric for future silicon technology devices. A high dielectric constant of similar to 20 and very low dielectric loss of similar to 0.1% are temperature and voltage independent at 100 kHz near ambient conditions. The Pt/HHO/Pt capacitor exhibits exceptionally low Schottky emission-based leakage currents. In combination with the large observed bandgap Eg of 5.6 eV, determined by diffuse reflectance spectroscopy, our results reveal fundamental physics and materials science of the HHO metal oxide and its potential application as a high-k dielectric for the next generation of complementary metal-oxide-semiconductor devices.
Citation
Pavunny , S P , Sharma , Y , Kooriyattil , S , Dugu , S , Katiyar , R K , Scott , J F & Katiyar , R S 2015 , ' Holmium hafnate : an emerging electronic device material ' , Applied Physics Letters , vol. 106 , no. 11 , 112902 . https://doi.org/10.1063/1.4915503
Publication
Applied Physics Letters
Status
Peer reviewed
ISSN
0003-6951Type
Journal article
Description
Financial support from DOE Grant No. DE-FG02-08ER46526 is acknowledged. S.P.P. is grateful to NSF for financial assistance under Grant No. NSF-EFRI RESTOR #1038272. Y.S. is thankful to IFN-NSF for doctoral fellowship under NSF-RII-0701525 grant.Collections
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