Electrical conduction and optical properties of doped SOI Photonic Crystals
Abstract
We investigate the electrical properties of silicon-on-insulator (SOI) photonic crystals as a function of both doping level and air filling factor. The resistance trends can be clearly explained by the presence of a depletion region around the sidewalls of the holes that is caused by band pinning at the surface. To understand the trade-off between the carrier transport and the optical losses due to free electrons in the doped SOI, we also measured the resonant modes of L3 photonic crystal nanocavities and found that surprisingly high doping levels, up to 10(18)/cm(3), are acceptable for practical devices with Q factors as high as 4×10(4).
Citation
Cardile , P , Franzo , G , Lo Savio , R , Galli , M , Krauss , T F , Priolo , F & O'Faolain , L 2011 , ' Electrical conduction and optical properties of doped SOI Photonic Crystals ' , Applied Physics Letters , vol. 98 , no. 20 , 203506 . https://doi.org/10.1063/1.3580613
Publication
Applied Physics Letters
Status
Peer reviewed
ISSN
0003-6951Type
Journal article
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