Hybrid plasmas for materials processing
Abstract
Hybrid plasmas have been reported in various areas of research over the last 40 years. However, a general overview of hybrid plasmas has never been presented or reported. In the present work, a survey of the literature and patents is carried out to provide the reader with a broad view of hybrid plasmas. The term refers to several different configurations of plasmas, including but not limited to: plasmas driven by several power sources simultaneously or sequentially, plasmas that have the properties of both thermal and nonthermal plasmas, plasmas that are enhanced by additional energy, and plasmas that are operated in a unique medium. In addition, a way of evaluating hybrid plasmas in terms of the improvement of processes is discussed, as well as the negative impacts that follow the employment of hybrid plasmas. Regardless of what the hybrid plasma in question is composed of, it often poses a unique advantage to its nonhybrid counterpart, whether it be used for welding, surface treatment, materials synthesis, coating deposition, gas phase reactions, or medicine.
Citation
Kusano , R & Kusano , Y 2023 , ' Hybrid plasmas for materials processing ' , Materials , vol. 16 , no. 11 , 4013 . https://doi.org/10.3390/ma16114013
Publication
Materials
Status
Peer reviewed
ISSN
1996-1944Type
Journal item
Rights
Copyright: © 2023 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/4.0/).
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