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A high-precision silicon-on-insulator position sensor
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dc.contributor.author | Beck, Paul | |
dc.contributor.author | Wynne, Laura C. | |
dc.contributor.author | Iadanza, Simone | |
dc.contributor.author | O’Faolain, Liam | |
dc.contributor.author | Schulz, Sebastian A. | |
dc.contributor.author | Banzer, Peter | |
dc.date.accessioned | 2023-05-09T11:30:09Z | |
dc.date.available | 2023-05-09T11:30:09Z | |
dc.date.issued | 2023-04-24 | |
dc.identifier.citation | Beck , P , Wynne , L C , Iadanza , S , O’Faolain , L , Schulz , S A & Banzer , P 2023 , ' A high-precision silicon-on-insulator position sensor ' , APL Photonics , vol. 8 , no. 4 , 046113 . https://doi.org/10.1063/5.0133968 | en |
dc.identifier.issn | 2378-0967 | |
dc.identifier.other | PURE: 285675671 | |
dc.identifier.other | PURE UUID: f996e384-0008-4ee6-9553-26cd4949a980 | |
dc.identifier.other | Jisc: 1067303 | |
dc.identifier.other | ORCID: /0000-0001-5169-0337/work/135018869 | |
dc.identifier.other | Scopus: 85158109284 | |
dc.identifier.uri | https://hdl.handle.net/10023/27539 | |
dc.description.abstract | Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200. | |
dc.format.extent | 7 | |
dc.language.iso | eng | |
dc.relation.ispartof | APL Photonics | en |
dc.rights | Copyright © 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). | en |
dc.subject | Computer Networks and Communications | en |
dc.subject | Atomic and Molecular Physics, and Optics | en |
dc.subject | QC Physics | en |
dc.subject | NDAS | en |
dc.subject | MCC | en |
dc.subject.lcc | QC | en |
dc.title | A high-precision silicon-on-insulator position sensor | en |
dc.type | Journal article | en |
dc.description.version | Publisher PDF | en |
dc.contributor.institution | University of St Andrews. School of Physics and Astronomy | en |
dc.identifier.doi | https://doi.org/10.1063/5.0133968 | |
dc.description.status | Peer reviewed | en |
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