A high-precision silicon-on-insulator position sensor
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Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.
Beck , P , Wynne , L C , Iadanza , S , O’Faolain , L , Schulz , S A & Banzer , P 2023 , ' A high-precision silicon-on-insulator position sensor ' , APL Photonics , vol. 8 , no. 4 , 046113 . https://doi.org/10.1063/5.0133968
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