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A high-precision silicon-on-insulator position sensor

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Beck_2023_APL_High_precision_CC.pdf (7.497Mb)
Date
24/04/2023
Author
Beck, Paul
Wynne, Laura C.
Iadanza, Simone
O’Faolain, Liam
Schulz, Sebastian A.
Banzer, Peter
Keywords
Computer Networks and Communications
Atomic and Molecular Physics, and Optics
QC Physics
NDAS
MCC
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Abstract
Integrated photonic devices provide significant advantages over their conventional counterparts, such as a drastically reduced footprint as well as compatibility with other photonic or electronic circuitry. In this work, we present a high-precision optical position sensor fabricated on a silicon-on-insulator platform. The sensor relies on the principle of position-dependent directional waveguide coupling upon excitation of a monolithically integrated scatterer with a tightly focused polarization-tailored beam. We demonstrate a spatial resolution of 7.2 nm, corresponding to approximately λ/200.
Citation
Beck , P , Wynne , L C , Iadanza , S , O’Faolain , L , Schulz , S A & Banzer , P 2023 , ' A high-precision silicon-on-insulator position sensor ' , APL Photonics , vol. 8 , no. 4 , 046113 . https://doi.org/10.1063/5.0133968
Publication
APL Photonics
Status
Peer reviewed
DOI
https://doi.org/10.1063/5.0133968
ISSN
2378-0967
Type
Journal article
Rights
Copyright © 2023 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
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  • University of St Andrews Research
URI
http://hdl.handle.net/10023/27539

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