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dc.contributor.authorShamim, Mohammed Zubair Mohammed
dc.contributor.authorPersheyev, Saydulla
dc.contributor.authorZaidi, Monji
dc.contributor.authorUsman, Mohammed
dc.contributor.authorShiblee, Mohammad
dc.contributor.authorAli, Syed Jaffar
dc.contributor.authorRahman, Mohammad Rizwanur
dc.identifier.citationShamim , M Z M , Persheyev , S , Zaidi , M , Usman , M , Shiblee , M , Ali , S J & Rahman , M R 2020 , ' Micro-nano fabrication of self-aligned silicon electron field emitter arrays using pulsed KrF laser irradiation ' , Integrated Ferroelectrics , vol. 204 , no. 1 , pp. 47-57 .
dc.descriptionThe authors gratefully acknowledge the support by the College of Engineering Research Center under the Deanship of Scientific Research of King Khalid University, Saudi Arabia. (Grant No. 98)en
dc.description.abstractSelf-aligned silicon micro-nano structured electron field emitter arrays were fabricated using pulsed krypton fluoride (KrF) excimer laser crystallization (ELC) of hydrogenated amorphous thin silicon films (a-Si:H) on metal coated backplane samples. We investigate the effect of laser processing parameters on the growth of micro-nano conical structures on the surface of the thin silicon films. Randomly oriented conical structures as high as 1 µm were fabricated using laser pulse frequency of 100 Hz and sample stage scanning speed of 0.25 mm/sec. Best field emission (FE) results were measured from samples with the highest surface features with FE currents in the order of 10−6 A and low turn-on emission threshold of ∼14 V/µm. Light emission from the prototype demonstrators was tested using bespoke driver electronics and planar anodes coated with indium tin-oxide (ITO) and medium voltage FE phosphors, to exemplify their usage for future flat panel display technologies.
dc.relation.ispartofIntegrated Ferroelectricsen
dc.subjectElectron field emission displayen
dc.subjectExcimer laser crystallizationen
dc.subjectHydrogenated amorphous siliconen
dc.subjectQC Physicsen
dc.subjectTK Electrical engineering. Electronics Nuclear engineeringen
dc.subjectControl and Systems Engineeringen
dc.subjectElectrical and Electronic Engineeringen
dc.subjectCeramics and Compositesen
dc.subjectElectronic, Optical and Magnetic Materialsen
dc.subjectMaterials Chemistryen
dc.subjectCondensed Matter Physicsen
dc.titleMicro-nano fabrication of self-aligned silicon electron field emitter arrays using pulsed KrF laser irradiationen
dc.typeJournal articleen
dc.contributor.institutionUniversity of St Andrews. Organic Semiconductor Centreen
dc.contributor.institutionUniversity of St Andrews. School of Physics and Astronomyen
dc.description.statusPeer revieweden

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