Micro-nano fabrication of self-aligned silicon electron field emitter arrays using pulsed KrF laser irradiation
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Self-aligned silicon micro-nano structured electron field emitter arrays were fabricated using pulsed krypton fluoride (KrF) excimer laser crystallization (ELC) of hydrogenated amorphous thin silicon films (a-Si:H) on metal coated backplane samples. We investigate the effect of laser processing parameters on the growth of micro-nano conical structures on the surface of the thin silicon films. Randomly oriented conical structures as high as 1 µm were fabricated using laser pulse frequency of 100 Hz and sample stage scanning speed of 0.25 mm/sec. Best field emission (FE) results were measured from samples with the highest surface features with FE currents in the order of 10−6 A and low turn-on emission threshold of ∼14 V/µm. Light emission from the prototype demonstrators was tested using bespoke driver electronics and planar anodes coated with indium tin-oxide (ITO) and medium voltage FE phosphors, to exemplify their usage for future flat panel display technologies.
Shamim , M Z M , Persheyev , S , Zaidi , M , Usman , M , Shiblee , M , Ali , S J & Rahman , M R 2020 , ' Micro-nano fabrication of self-aligned silicon electron field emitter arrays using pulsed KrF laser irradiation ' , Integrated Ferroelectrics , vol. 204 , no. 1 , pp. 47-57 . https://doi.org/10.1080/10584587.2019.1674988
Copyright © 2020 Taylor & Francis Group, LLC. This work has been made available online in accordance with publisher policies or with permission. Permission for further reuse of this content should be sought from the publisher or the rights holder. This is the author created accepted manuscript following peer review and may differ slightly from the final published version. The final published version of this work is available at https://doi.org/10.1080/10584587.2019.1674988.
DescriptionThe authors gratefully acknowledge the support by the College of Engineering Research Center under the Deanship of Scientific Research of King Khalid University, Saudi Arabia. (Grant No. 98)
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