Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool
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Micro- and nanocantilevers are employed in atomic force microscopy (AFM) and in micro- and nanoelectromechanical systems (MEMS and NEMS) as sensing elements. They enable nanomechanical measurements, are essential for the characterization of nanomaterials, and form an integral part of many nanoscale devices. Despite the fact that numerous methods described in the literature can be applied to determine the static flexural spring constant of micro- and nanocantilever sensors, experimental techniques that do not require contact between the sensor and a surface at some point during the calibration process are still the exception rather than the rule. We describe a noncontact method using a microfluidic force tool that produces accurate forces and demonstrate that this, in combination with a thermal noise spectrum, can provide the static flexural spring constant for cantilever sensors of different geometric shapes over a wide range of spring constant values (≈0.8–160 N/m).
Parkin , J D & Hähner , G 2016 , ' Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool ' Beilstein Journal of Nanotechnology , vol 7 , pp. 492-500 . DOI: 10.3762/bjnano.7.43
Beilstein Journal of Nanotechnology
© 2016 Parkin and Hähner; licensee Beilstein-Institut. This is an Open Access article under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Financial support from the EPSRC (EP/K000411/1 and EP/L017008/1) and the University of St. Andrews under an Impact Acceleration Account (EP/K503940/1) are gratefully acknowledged.