Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths
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We present a method for detecting light in the 1550 nm wavelength window based on a silicon nitride waveguide that is vertically coupled to a silicon photonic crystal cavity. The absorption in silicon arises from deep-levels created by ion implantation, thereby providing excellent CMOS compatibility. We demonstrate a responsivity of 0.108 A/W at -10 V reverse bias with a dark current of 9.4 nA. Our work demonstrates one of the smallest wavelength selective photodectors realised to date. By cascading such detectors we also demonstrate a two-channel demultiplexer.
Debnath , K , Gardes , F Y , Knights , A P , Reed , G T , Krauss , T F & O'Faolain , L 2013 , ' Dielectric waveguide vertically coupled to all-silicon photodiodes operating at telecommunication wavelengths ' , Applied Physics Letters , vol. 102 , no. 17 , 171106 . https://doi.org/10.1063/1.4803541
Applied Physics Letters
Copyright 2013, American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters 102 (17) and may be found at: http://scitation.aip.org/content/aip/journal/apl/102/17/10.1063/1.4803541
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