Towards integrated position sensors with nanometer precision
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The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.
Schulz , S A , Beck , P , Wynne , L C , Iadanza , S , O'Faolain , L & Banzer , P 2023 , Towards integrated position sensors with nanometer precision . in C G Littlejohns & M Sorel (eds) , Emerging applications in silicon photonics III . , 1233405 , Proceedings of SPIE , vol. 12334 , SPIE , Bellingham, WA , Emerging Applications in Silicon Photonics III , Birmingham , United Kingdom , 6/12/22 . https://doi.org/10.1117/12.2644959conference
Emerging applications in silicon photonics III
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