Towards fully integrated photonic displacement sensors
Abstract
The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration a task highly relevant for future nanotechnological devices necessitates the reduction of the spatial footprint of sensing schemes by the deployment of novel concepts. A promising route towards thisgoal is predicated on the controllable directional emission of the fundamentally smallest emitters of light, i.e. dipoles, as an indicator. Here we realize an integrated displacement sensor based on the directional emission of Huygens dipoles excited in an individual dipolar antenna. The position of the antenna relative to the excitation field determines its directional coupling into a six-way crossing of photonic crystal waveguides. In our experimental study supported by theoretical calculations, we demonstrate the first prototype of an integrated displacement sensor with a standard deviation of the position accuracy below λ=300 at room temperature and ambient conditions.
Citation
Bag , A , Neugebauer , M , Mick , U , Christiansen , S , Schulz , S A & Banzer , P 2020 , ' Towards fully integrated photonic displacement sensors ' , Nature Communications , vol. 11 , 2915 . https://doi.org/10.1038/s41467-020-16739-y
Publication
Nature Communications
Status
Peer reviewed
ISSN
2041-1723Type
Journal article
Description
Funding: European Union Horizon 2020 research and innovation programme under the Future and Emerging Technologies Open grant agreement Super-pixels No 829116.Collections
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